Temporal evolution of double layers in pulsed helicon plasmas
نویسندگان
چکیده
منابع مشابه
SiO2 deposition from oxygen/silane pulsed helicon diffusion plasmas
Near-stoichiometric SiO2 films, with little H incorporation and wet etch rates 1.5–3 times that of thermal oxide, have been deposited in a low pressure oxygen/silane helicon diffusion plasma, which has been pulsed with a 50% duty cycle at frequencies from 0.005 Hz to 1 kHz. At low pulse frequencies, the deposition rate is about 50% of the continuous rate, but as the pulse frequency increases fr...
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Double layers have been observed to propagate from the source region to the diffusion chamber of a helicon-type reactor filled up with a low-pressure mixture of Ar/SF6 N. Plihon et al., J. Appl. Phys. 98, 023306 2005 . In the present paper the most significant and new experimental results are reported. A fully self-consistent hybrid model in which the electron energy distribution function, the ...
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Good-quality silicon dioxide films have been deposited at low temperature (≤200 °C) using continuous and pulsed oxygen/silane plasmas coupled in a high-density, low-pressure helicon reactor. Although the total ion flux determines many of the structural properties of the deposited oxide, we have found that silicon-containing ions contribute to the film growth (up to 50 %) and appear to be respon...
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Double layers DLs have been observed in a plasma reactor composed of a source chamber attached to a larger expanding chamber. Positive ion beams generated across the DL were characterized in the low plasma potential region using retarding field energy analyzers. In electropositive gases, DLs were formed at very low pressures between 0.1 and 1 mTorr with the plasma expansion forced by a strongly...
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Expanding electronegative EN plasmas have been previously observed, experimentally, to generate wave activity. Using a particle-in-cell PIC code we have investigated these waves in expanding EN plasmas containing a double layer DL between an upstream source region and an expanded downstream region. Oxygen reaction rates were used but modified to correspond more closely to experimental condition...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2009
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.3204014